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Semiconductor, Nanotechnology, MEMS Products

Incorporating manufacturing excellence, applications and service expertise in support of quality products for the semiconductor industry.


SAPPHIRE SERIES


CLASS 1 ROBOTIC WORK CELL SYSTEMS
Single-Chamber, Dual Chamber, Single-Chamber Polyimide, Dual Chamber Polyimide

Convection Models:

Forced Air With Internal Heating

Vacuum Models:

Vacuum Chamber System With External Heating
Temperatures to 450°C

Suggested Processes:

Vacuum Curing, Coating, Film Drying, HMDS, Image Reversal

View Specs
The Sapphire Series Work Cell is a complete thermal processing system which integrates specialty heating units with robotic systems. The heating units are either high-end, stand-alone convection units or top-of-the-line vacuum systems. Options for 200MM and 300MM, one or two process chambers as required.


Benefits:

  • Easily customized
  • Improves process yield
  • Higher throughput
  • Process redundancy
  • Small footprint
  • Reduced maintenance costs
  • Inexpensive to switch from 200MM to 300MM
  • Compatibility with modern production facilities
  • Inexpensive to change process type
  • Allows compatibility of equipment with different processes
  • Cleaner processing through automation

Features:

  • One size workcell
  • One robotic handler
  • SMIFF port
  • Single wafer transfer system
  • The temperature module is selected to match the process
  • Singe or dual temperature process chambers
  • Wafer transfer system
  • Robotic handling of cassette
  • Bar code reader
For information on any of these products or on customizing options, please contact Allegiant Global Technologies, or your local representative.