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Semiconductor, Nanotechnology, MEMS Products

Incorporating manufacturing excellence, applications and service expertise in support of quality products for the semiconductor industry.


Vacuum Chamber With External Heating or Gas Flow-Through
Advanced HMI control
Temperatures to 1200°C

Suggested Processes:

Diffusion, Poly, TEOS, Oxidation, LTO, Nitride

View Specs
The Lambda Series of process systems provides a choice of two tube diameters, two temperature ranges and six process types. This series is a single-tube; stand-alone system designed for the needs of R&D and small production facilities. Systems are available for Oxidation, Poly, Nitride, Diffusion, and TEOS. Omnisoph© Control System.


  • Easily customized
  • Designed for ease of operation
  • Low cost
  • Diffusion, Oxidation, Poly, Nitride, and TEOS
  • Tabletop, single-tube for reduced space
  • Temperature ranges to 1200°C
  • Compatible with modern production facilities
  • Full interfacing available for SECSII and GEM
  • Allows compatibility of equipment with different processes
  • Compatible with all safety standards
  • Automation available
  • Minimal maintenance costs


  • Two tube sizes
  • Tabletop design
  • Complete turnkey system with quartzware and gas panel
  • All pumps supplied where required
  • Fully computer controlled with SECII and GEM options
  • Full HMI interface with flat panel touch screen
  • 12 models to meet your process needs
  • Powered from 208v 3-phase power for easy installation
For information on any of these products or on customizing options, please contact Allegiant Global Technologies, or your local representative.