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Semiconductor, Nanotechnology, MEMS Products

Incorporating manufacturing excellence, applications and service expertise in support of quality products for the semiconductor industry.


GEMINI SERIES - CLASS SPECIALTY


Vacuum Chamber System With External Heating
Temperatures to 250°C

Suggested Processes:

HMDS, Image Reversal

View Specs
The Gemini Series of top-of-the-line vacuum systems provides a wide range of chamber sizes and temperature ranges; clean-room and coating options. They are designed to increase yields and reduce expenses for the modern semiconductor manufacturing facility.


Benefits:

  • Easily customized
  • Improves process yield
  • Increases throughput
  • Reduces floor space requirements
  • Reduces maintenance costs
  • Temperature ranges to 250°C
  • Compatible with modern production facilities
  • Full interfacing available for SECSII and GEM
  • Allows compatibility of equipment with different processes
  • Cleaner processing through automation
  • Compatible with factory automation

Features:

  • Three chamber sizes
  • Adaptable to automation operation
  • Fully computer controlled with SECII and GEM options
  • Small footprint
  • Tabletop design
  • Full HMI interface with flat panel touch screen
  • 18 models to meet your process needs
  • Designed as a stand-alone system to include vacuum gate valve
  • Bar code reader option

For information on any of these products or on customizing options, please contact Allegiant Global Technologies, or your local representative.