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Semiconductor, Nanotechnology, MEMS Products

Incorporating manufacturing excellence, applications and service expertise in support of quality products for the semiconductor industry.


Vacuum Chamber System With External Heating
Advanced HMI Control
Temperatures up to 250°C

Suggested Processes:

Flat Panel Processing and Parts Drying

View Specs
The Alpha Series of vacuum drying systems provides a wide range of chamber sizes and temperature ranges designed to be an efficient processing tool for larger Flat Panel displays or store equipment parts in a clean environment until needed for production. This results in increased yields and reduced expenses for the modern semiconductor manufacturing facility.


  • Easily customized
  • Improves process yield
  • Increases throughput
  • Reduces floor space requirements and maintenance costs
  • Compatible with modern production facilities
  • Full interfacing available for SECII and GEM
  • Allows compatibility of equipment with different processes
  • Compatible with all safety standards
  • Provides clean, dry storage area for quick parts change


  • Three chamber sizes
  • Systems designed for parts storage
  • Designed for class 10 operation (Class 1 optional)
  • Flexible shelf layout for customer convenience
  • Fully computer controlled with SECII and GEM options
  • Small footprint
  • Full HMI interface with flat panel touchscreen
  • Stand-alone design
  • 3 models to meet your process needs
  • Designed as a stand-alone system to include vacuum gate valve
  • Bar code reader option
For information on any of these products or on customizing options, please contact Allegiant Global Technologies, or your local representative.